- Surface morphology、Dimension Measurement 表面形貌、尺寸量测
- Optical profiler, SEM, TEM
- Film type and thickness 薄膜类型及薄膜厚度
- SEM/EDS, TEM/EDS
- Q-well structure 量子井结构分析
- SEM/EDS, TEM/EDS
- Defects (Dislocations) 缺陷分析
- TEM
- Q-Well Periodic Doping Profile 量子井周期掺杂分布
- SIMS
- Defect Isolation 缺陷定位
- EMMI、OBIRCH
- Failure Analysis 失效分析
- X-ray,SAM,EMMI,SEM,FIB,TEM
- ESD Testing 静电测试
- 可靠性测试