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 1999年底，由厦门大学、萨本栋教育科研基金会和厦门市政府共同创议设立厦门大学萨本栋微机电研究中心，并且成立了筹委会。经过两年时间的筹建，大楼于2002年2月建成，中心正式于2002年9月开始运行，2003年经验收成为厦门市（福建省）MEMS工业工程中心，2006年获批为福建省高校重点实验室。
中心的目标是建设世界一流的微纳米研究中心，使中心成为一个多学科交叉的开放性的公共研究平台，微纳米器件与系统创新科技人才的培养平台，以及科研成果转化和产业化的基地。
中心的研究方向，主要从事微纳米加工技术、微纳米材料以及微纳米器件与系统的研究与应用，并为国内外产业及研究机构服务。
经过前期的建设，中心3800平方米的中心大楼 “亦玄馆”内拥有100级、1000级、10000级共计660平方米的工艺洁净室、各种高纯气体供气系统、18MΩ纯水系统、三废处理系统、防震工作台等。中心现有80多台各种微机电工艺设备，如AMS 200深硅等离子体刻蚀系统、ICP-2B刻蚀机、AWB04键合机、MA6/BA6 Karlsuss双面光刻机和键合机、POLI-400化学机械抛光机、WL2040铝丝压焊机、OPTI CAOT 22i喷涂胶机系统、ZSH406全自动划片机、DQ-500等离子去胶机、全自动清洗甩干机、AXTRON MOCVD金属有机物化学气相沉积系统、4470微控四管扩散炉、4371LPCVD低压化学沉积系统、OMICRON分子束外延系统、JS-3X100B磁控溅射台、PECVD-2E等离子淀积台、ZZSX500C电子束蒸发台、JC500-3/D磁控溅射镀膜机、石英管清洗机，以及多种常用测试仪器, 如OLS1100激光共聚焦显微镜、DEKTAK-III台阶测量仪、D41-11A/ZN四探针电阻测试仪、Nikon L150金相显微镜等。
中心成立以来已经承担多项国家级、省部级科研课题以及企业合作重大课题。目前正在进行与生物医学工程、航空航天、通讯工程、汽车工业、新能源等行业相关的微纳米器件及系统的研究和开发，并不断拓展合作研究与开发的新领域。
In Decemeber1999, Pen-Tung Sah MEMS Research Center was proposed jointly by Xiamen University, Pen-Tung Sah Educational & Scientific Research Foundation of Xiamen University, and Xiamen Municipal Government, and the Preparatory Committee was founded for its establishment. After a 2-year preparation, the central building was constructed in February of 2002 and the Center went into operation formally in September of 2002. In 2003 the Center was inspected and accepted as Xiamen City (Fujian Province) MEMS Industrial Engineering Center, and in 2006 was appointed as the Key Laboratory among universities and colleges in Fujian Province.
With the aim of being a first rate MEMS Research Center in the world, the center is pursuing to become a public platform for multidisciplinary research, a platform for training technical and creative talents in the fields of MEMS and Nano technology, an experimental base for commercializing and/or industrializing achievements in scientific research.
The current research fields of the center are micro and nano fabrication technologies, micro and nano materials, and micro and nano systems. The center will also serve both domestic and international industries and scientific research institutions.
After construction of the 3800m2 central building has been completed in 2002, the center owns a 660m2 clean rooms of class 100, class 1000 and class 10000. Currently, the laboratory of the center is equipped with various high purity gas supplying system, 18M? resistance pure water system, 3-waste treatment system, and shock-proof working-table, and about 80 sets of micro-electrical-mechanical technical equipment are installed, including AMS200 ICP plasma etching system, ICP-2B etching machine, AWB04 bonding machine, MA6/BA6 Karlsus double-face photolithography machine/bonding machine, POLI-400 chemical-mechanical-polishing tool, WL2040 aluminum-wire press welder, OPTI CAOT 22i decktop precision spin coasting system, ZSH406 automatic dicing saw system, DQ-500 plasma photoresist-removing machine, HXS150S automatic centrifugal spinner, AXTRON MOCVD metal organic chemical vapor deposit system, 4470 micro-control 4-tube diffusing furnace, type 4371 LPCVD low pressure chemical vapor deposit system, OMICRON MBE molecular beam epitaxy system, JS-3X100B magnet-control spattering equipment, PECVD-2E plasma deposit apparatus, ZZSX500C electron-beam vapor equipment, JC500-3/D magnet-control spattering-coating machine, H63-14/ZM quartz-tube cleaning machine. Measurement instruments include OLS1100 Confocal Laser Scanning Microscope, DEKTAKIII Surface Profiler, D41-11A/ZN 4-probe resistance test instrument, Nikon L150 metallurgical microscope, and so on.
Since establishment, the center has worked for many national and provincial scientific research projects and industrial collaborative programs, involving biomedical engineering, aerospace, telecommunication, automobiles industry and new and renewable energy resources. With the fast development of China economy, the research fields and projects and industrial collaborative programs of the center are continuously growing.
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| 公司名称： |
厦门大学萨本栋微纳米技术研究中心 |
公司类型： |
事业单位或社会团体 (服务商) |
| 所 在 地： |
福建/厦门市 |
公司规模： |
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| 注册资本： |
未填写 |
注册年份： |
1999 |
| 资料认证： |
    企业资料通过认证 |
| 经营模式： |
服务商 |
| 经营范围： |
微纳米加工技术、微纳米材料以及微纳米器件与系统的研究与应用 |
| 主营行业： |
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